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Equipment and Facilities at Stanford

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We commonly use shared equipment in both the Stanford Nano Shared Facilities (SNSF) and the Stanford Nanofabrication Facilities (SNF).

SNSF

The Stanford Nano Shared Facilities (SNSF) is a group of service centers (Nanofabrication, Electron & Ion Microscopy, X-ray & Surface Analysis and Soft & Hybrid Materials) that includes the Stanford Nanocharacterization Laboratory, the Nanopatterning Cleanroom, the Ginzton Microfab, and the Soft and Hybrid Materials Facility. On a regular basis, our group uses the SNSF's scanning electron microscopes (SEM), transmission electron microscopes (TEM), x-ray diffractometers (XRD), and x-ray photoelectron spectrometers (XPS), among others.

SNF

The Stanford Nanofabrication Facility (SNF) includes a 10,000 sq. ft. cleanroom housing tools for device fabrication at virtually every step including oxidation furnaces, chemical vapor deposition (CVD), wet benches, plasma etching, lithography, etc., as well as two satellite labs supporting Metallo Organic Chemical Vapor Deposition (MOCVD) and new experimental fabrication methods (ExFab).